Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Sanjeev Baluja, Tejas Ulavi, Ashutosh Agarwal | 2024-12-31 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar, Sanjeev Baluja | 2024-08-06 |