Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Sanjeev Baluja, Eric J. Hoffmann, Ashutosh Agarwal | 2024-12-31 |
| 12087555 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2024-09-10 |
| 12018376 | Apparatus and methods for motor shaft and heater leveling | Ashutosh Agarwal, Sanjeev Baluja | 2024-06-25 |
| 12020957 | Heater assembly with process gap control for batch processing chambers | Akshay Gunaji, Sanjeev Baluja | 2024-06-25 |
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi | 2024-04-02 |
| 11923233 | Dual-function wafer backside pressure control and edge purge | Joseph AuBuchon | 2024-03-05 |