TB

Thomas H. Baum

EN Entegris: 6 patents #2 of 135Top 2%
Overall (2024): #21,449 of 561,600Top 4%
6
Patents 2024

Issued Patents 2024

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
12173014 Group VI precursor compounds David M. Ermert 2024-12-24
12071688 Precursors and methods for preparing silicon-containing films Sangjin Lee, Dahye Kim, Sungsil Cho, Seobong Chang, Jae-eon Park +2 more 2024-08-27
12037681 Method for forming carbon rich silicon-containing films Sungsil Cho, Seobong Chang, Jae-eon Park, Bryan C. Hendrix 2024-07-16
11987878 Chemical vapor deposition processes using ruthenium precursor and reducing gas Philip S. H. Chen, Bryan C. Hendrix 2024-05-21
11965239 Method for nucleation of conductive nitride films Gavin Charles Richards, Han Wang, Bryan C. Hendrix 2024-04-23
11919780 Oxyhalide precursors David M. Ermert, Robert Wright, Jr., Bryan C. Hendrix 2024-03-05