Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 12020957 | Heater assembly with process gap control for batch processing chambers | Tejas Ulavi, Sanjeev Baluja | 2024-06-25 |
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi, Tejas Ulavi | 2024-04-02 |