Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119209 | Dynamic processing chamber baffle | Udit S. Kotagi | 2024-10-15 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Paul Brillhart, Akshay Gunaji +6 more | 2024-07-16 |
| 12020907 | Faceplate with localized flow control | Arun Thottappayil, Junghoon Sun, Jun Tae Choi, Hang Yu | 2024-06-25 |
| 11929278 | Low impedance current path for edge non-uniformity tuning | Madhu Santosh Kumar Mutyala, Saketh Pemmasani, Akshay Dhanakshirur, Hang Yu, Deenesh Padhi | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Saketh Pemmasani, Akshay Dhanakshirur, Madhu Santosh Kumar Mutyala, Hang Yu, Deenesh Padhi | 2024-01-09 |