Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11929278 | Low impedance current path for edge non-uniformity tuning | Madhu Santosh Kumar Mutyala, Akshay Dhanakshirur, Mayur Govind Kulkarni, Hang Yu, Deenesh Padhi | 2024-03-12 |
| 11869795 | Mesa height modulation for thickness correction | Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala, Hang Yu, Deenesh Padhi | 2024-01-09 |