Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119221 | PEALD nitride films | Hanhong Chen, Philip Allan Kraus | 2024-10-15 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Sanjeev Baluja, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2024-09-03 |
| 12060638 | Deposition apparatus and methods using staggered pumping locations | Sanjeev Baluja, Ashutosh Agarwal | 2024-08-13 |
| 11978625 | Methods of forming metal nitride films | — | 2024-05-07 |
| 11923233 | Dual-function wafer backside pressure control and edge purge | Tejas Ulavi | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Sanjeev Baluja, Mandyam Sriram | 2024-02-06 |