Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119221 | PEALD nitride films | Philip Allan Kraus, Joseph AuBuchon | 2024-10-15 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan | 2024-09-03 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Kelvin Chan, Philip Allan Kraus, Thai Cheng Chua | 2024-04-09 |