Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus | 2024-11-12 |
| 12002654 | Modular high-frequency source | Christian Amormino, Hanh Nguyen, Kallol Bera, Philip Allan Kraus | 2024-06-04 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Hanhong Chen, Kelvin Chan, Philip Allan Kraus | 2024-04-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2024-01-23 |