Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
| 12002654 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Kallol Bera, Philip Allan Kraus | 2024-06-04 |