Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181801 | Chamber and methods of treating a substrate after exposure to radiation | Dmitry Lubomirsky, Douglas A. Buchberger, Jr., Hyunjun Kim, Ellie Yieh | 2024-12-31 |
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Hanh Nguyen, Xinglong Chen, Matthew L. Miller, Soonam Park +5 more | 2024-11-19 |
| 12142467 | Self-assembled monolayer deposition from low vapor pressure organic molecules | Srinivas D. Nemani, Keith Tatseun Wong, Antony K. Jan | 2024-11-12 |
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Douglas A. Buchberger, Jr., Gautam Pisharody, Dmitry Lubomirsky, Shekhar ATHANI | 2024-10-08 |
| 11976973 | Blending of agricultural products via hyperspectral imaging and analysis | Seetharama C. Deevi, Henry M. Dante, Samuel Timothy Henry | 2024-05-07 |
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Sultan Malik, Srinivas D. Nemani, Adib Khan | 2024-04-02 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Ludovic Godet, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2024-02-13 |