Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057329 | Selective etch using material modification and RF pulsing | Bhargav S. Citla, Chentsau Ying, Srinivas D. Nemani, Michael W. Stowell | 2024-08-06 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani, Daniel J. Woodruff +2 more | 2024-02-13 |