Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057329 | Selective etch using material modification and RF pulsing | Chentsau Ying, Srinivas D. Nemani, Viachslav Babayan, Michael W. Stowell | 2024-08-06 |
| 11972943 | Methods and apparatus for depositing dielectric material | Jethro Tannos, Srinivas D. Nemani, Joshua Rubnitz | 2024-04-30 |
| 11955333 | Methods and apparatus for processing a substrate | Jethro Tannos, Srinivas D. Nemani, Ellie Yieh, Joshua Rubnitz, Erica Chen +3 more | 2024-04-09 |
| 11862458 | Directional selective deposition | Soham Asrani, Joshua Rubnitz, Srinivas D. Nemani, Ellie Yieh | 2024-01-02 |