Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12181801 | Chamber and methods of treating a substrate after exposure to radiation | Dmitry Lubomirsky, Douglas A. Buchberger, Jr., Qiwei Liang, Hyunjun Kim | 2024-12-31 |
| 12085858 | Photoresist patterning process | Huixiong Dai, Srinivas D. Nemani, Steven Hiloong WELCH, Mangesh Ashok BANGAR | 2024-09-10 |
| 11955333 | Methods and apparatus for processing a substrate | Jethro Tannos, Bhargav S. Citla, Srinivas D. Nemani, Joshua Rubnitz, Erica Chen +3 more | 2024-04-09 |
| 11914299 | Lithography process window enhancement for photoresist patterning | Huixiong Dai, Mangesh Ashok BANGAR, Srinivas D. Nemani, Christopher S. Ngai | 2024-02-27 |
| 11881411 | High pressure annealing process for metal containing materials | Kaushal K. Singh, Mei-Yee Shek, Srinivas D. Nemani | 2024-01-23 |
| 11880137 | Film structure for electric field guided photoresist patterning process | Huixiong Dai, Mangesh Ashok BANGAR, Srinivas D. Nemani, Steven Hiloong WELCH, Christopher S. Ngai | 2024-01-23 |
| 11862458 | Directional selective deposition | Bhargav S. Citla, Soham Asrani, Joshua Rubnitz, Srinivas D. Nemani | 2024-01-02 |