Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112972 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Qiwei Liang, Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Shekhar ATHANI | 2024-10-08 |