Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146219 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2024-11-19 |
| 11948828 | Pin-less substrate transfer apparatus and method for a processing chamber | Sultan Malik, Srinivas D. Nemani, Qiwei Liang | 2024-04-02 |