Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Thai Cheng Chua, Philip Allan Kraus | 2024-11-12 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta +1 more | 2024-07-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Vladimir Knyazik, Philip Allan Kraus +1 more | 2024-01-23 |