Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12114488 | Enhancing gapfill performance of dram word line | Yong Yang, Kunal Bhatnagar, Srinivas Gandikota, Seshadri Ganguli, Jose Alexandro Romero +3 more | 2024-10-08 |
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Ilanit Fisher, Chi-Chou Lin, Kedi Wu, Wen-Ting Chen, Shih Chung Chen +4 more | 2024-08-13 |
| 12051734 | PMOS high-k metal gates | Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yixiong Yang, Yong Yang | 2024-07-30 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja | 2024-02-06 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota +1 more | 2024-01-30 |