Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1053695 | Servo amplifier | Hiroyuki Kato, Shinichi Kato, Asuna Osawa, Masaaki Kadoyanagi, Shotaro Hirako +1 more | 2024-12-10 |
| 12142459 | Single chamber flowable film formation and treatments | Khokan Chandra Paul, Adam J. Fischbach, Canfeng Lai | 2024-11-12 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2024-03-05 |
| 11887818 | Methods and systems to modulate film stress | John C. Forster, Ran Liu, Kenichi Ohno, Ning Li, Mihaela Balseanu +2 more | 2024-01-30 |