Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Ilanit Fisher, Kedi Wu, Wen-Ting Chen, Shih Chung Chen, Srinivas Gandikota +4 more | 2024-08-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Ilanit Fisher, Kedi Wu, Wen-Ting Chen, Shih Chung Chen, Srinivas Gandikota +4 more | 2024-08-13 |