Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Anqing Cui | 2024-08-06 |
| 11932939 | Lids and lid assembly kits for atomic layer deposition chambers | Muhammad M. Rasheed, Srinivas Gandikota, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more | 2024-03-19 |