Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez | 2024-08-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez | 2024-08-06 |