Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhammad M. Rasheed, Mario D. Sanchez, Anqing Cui | 2024-08-06 |
| 11976363 | Purge ring for pedestal assembly | Mario D. Silvetti, Kevin Griffin | 2024-05-07 |
| 11944988 | Multi-zone showerhead | Muhammad M. Rasheed | 2024-04-02 |