Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12054826 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Mario D. Sanchez, Anqing Cui | 2024-08-06 |
| 11944988 | Multi-zone showerhead | Muhannad Mustafa | 2024-04-02 |
| 11932939 | Lids and lid assembly kits for atomic layer deposition chambers | Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more | 2024-03-19 |
| 11915917 | Methods and apparatus for reducing sputtering of a grounded shield in a process chamber | Alan A. Ritchie, John C. Forster | 2024-02-27 |