Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12057333 | Metrology slot plates | Kenneth Brian Doering, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang | 2024-08-06 |
| 12020911 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Ganesh Balasubramanian, Jiheng Zhao | 2024-06-25 |
| 11883626 | Detection of an endoscope to a fluid management system | Peter J. Pereira, Niraj Prasad Rauniyar | 2024-01-30 |
| 11859275 | Techniques to improve adhesion and defects for tungsten carbide film | Anup K. Singh, Bhaskar Kumar, Ganesh Balasubramanian | 2024-01-02 |