Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142468 | Stress treatments for cover wafers | Vinayak Vishwanath Hassan, Meng Cai, Sowjanya Musunuru, Kaushik Alayavalli, Andrew Nguyen | 2024-11-12 |
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Krishna Nittala, Pramit Manna +2 more | 2024-10-01 |
| 12020911 | Chucking process and system for substrate processing chambers | Ganesh Balasubramanian, Vivek Shah, Jiheng Zhao | 2024-06-25 |
| 11996273 | Methods of seasoning process chambers | Vinayak Vishwanath Hassan, Anup K. Singh | 2024-05-28 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Timothy Joseph Franklin, Kaushik Alayavalli, Akshay Dhanakshirur +1 more | 2024-04-16 |
| 11859275 | Techniques to improve adhesion and defects for tungsten carbide film | Vivek Shah, Anup K. Singh, Ganesh Balasubramanian | 2024-01-02 |