Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142468 | Stress treatments for cover wafers | Vinayak Vishwanath Hassan, Bhaskar Kumar, Meng Cai, Sowjanya Musunuru, Andrew Nguyen | 2024-11-12 |
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more | 2024-10-01 |
| 12068153 | Situ clean for bevel and edge ring | Andrew Nguyen, Edward Haywood, Lu Liu, Malav Kapadia | 2024-08-20 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Timothy Joseph Franklin, Akshay Dhanakshirur, Stephen C. Garner +1 more | 2024-04-16 |