Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068153 | Situ clean for bevel and edge ring | Kaushik Alayavalli, Andrew Nguyen, Lu Liu, Malav Kapadia | 2024-08-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068153 | Situ clean for bevel and edge ring | Kaushik Alayavalli, Andrew Nguyen, Lu Liu, Malav Kapadia | 2024-08-20 |