Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131913 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis, Karthik Janakiraman | 2024-10-29 |
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Pramit Manna +2 more | 2024-10-01 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya, Zubin Huang +1 more | 2024-04-16 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Karthik Janakiraman, Aykut Aydin, Diwakar Kedlaya | 2024-03-26 |