Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142480 | Seam removal in high aspect ratio gap-fill | Qinghua Zhao, Rui Cheng, Ruiyun Huang, Dong-Hyung LEE, Aykut Aydin | 2024-11-12 |
| 12131913 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis | 2024-10-29 |
| 12077852 | Metal-doped boron films | Aykut Aydin, Rui Cheng | 2024-09-03 |
| 12060637 | Actively cooled foreline trap to reduce throttle valve drift | Gaosheng Fu, Tuan Nguyen, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez | 2024-08-13 |
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 12033848 | Processes for depositing sib films | Aykut Aydin, Rui Cheng, Abhijit Basu Mallick, Takehito Koshizawa, Bo Qi | 2024-07-09 |
| 11961739 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Diwakar Kedlaya, Zubin Huang +1 more | 2024-04-16 |
| 11939675 | Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity | Rui Cheng, Zubin Huang | 2024-03-26 |
| 11939674 | Methods to reduce material surface roughness | Yi Yang, Krishna Nittala, Aykut Aydin, Diwakar Kedlaya | 2024-03-26 |