| 12173413 |
High pressure oxidation of metal films |
Amrita B. Mullick, Pramit Manna |
2024-12-24 |
$95,614,000 |
| 12110584 |
Low temperature growth of transition metal chalcogenides |
Chandan Das, Susmit Singha Roy, Bhaskar Jyoti Bhuyan, John Sudijono, Mark Saly |
2024-10-08 |
$69,128,000 |
| 12054827 |
Flowable film curing using H2 plasma |
Shishi Jiang, Pramit Manna, Suresh Chand Seth, Srinivas D. Nemani |
2024-08-06 |
$90,312,000 |
| 12046468 |
Conformal silicon-germanium film deposition |
Huiyuan Wang, Susmit Singha Roy |
2024-07-23 |
$84,339,000 |
| 12037679 |
Method of forming a diamond film |
Vicknesh Sahmuganathan, Jiteng Gu, Zhongxin Chen, Kian Ping Loh, John Sudijono +5 more |
2024-07-16 |
$116,305,000 |
| 12033848 |
Processes for depositing sib films |
Aykut Aydin, Rui Cheng, Karthik Janakiraman, Takehito Koshizawa, Bo Qi |
2024-07-09 |
$62,454,000 |
| 12027374 |
Processes to deposit amorphous-silicon etch protection liner |
Zeqing Shen, Bo Qi |
2024-07-02 |
$85,126,000 |
| 12018364 |
Super-conformal germanium oxide films |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Bo Qi |
2024-06-25 |
$57,214,000 |
| 12014925 |
Metal-doped carbon hardmasks |
Eswaranand Venkatasubramanian, Bhaskar Jyoti Bhuyan, Mark Saly |
2024-06-18 |
$83,264,000 |
| 11994800 |
Dose reduction of patterned metal oxide photoresists |
Tejinder Singh, Lifan Yan, Daniel Lee Diehl, Ho-yung David Hwang, Jothilingam Ramalingam |
2024-05-28 |
$67,076,000 |
| 11990369 |
Selective patterning with molecular layer deposition |
Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy |
2024-05-21 |
$57,593,000 |
| 11978635 |
Silicide films through selective deposition |
Swaminathan Srinivasan, Nicolas L. Breil |
2024-05-07 |
$105,661,000 |
| 11972940 |
Area selective carbon-based film deposition |
Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy, Jiecong Tang +2 more |
2024-04-30 |
$79,776,000 |
| 11967524 |
3D NAND gate stack reinforcement |
Praket P. Jha, Shuchi Sunil Ojha, Jingmei Liang, Shankar Venkataraman |
2024-04-23 |
$64,043,000 |
| 11946134 |
In situ nucleation for nanocrystalline diamond film deposition |
Sze Chieh Tan, Vicknesh Sahmuganathan, Eswaranand Venkatasubramanian, John Sudijono |
2024-04-02 |
$42,223,000 |
| 11894230 |
Tribological properties of diamond films |
Vicknesh Sahmuganathan, Jiteng Gu, Eswaranand Venkatasubramanian, Kian Ping Loh, John Sudijono +1 more |
2024-02-06 |
$39,056,000 |
