Area selective carbon-based film deposition

Assignee

• Applied Materials

Inventors

• Xinke Wang (4 patents)
• Bhaskar Jyoti Bhuyan (63 patents)
• Zeqing Shen (14 patents)
• Susmit Singha Roy (21 patents)
• Abhijit Basu Mallick (217 patents)
• Jiecong Tang (2 patents)
• John Sudijono (68 patents)
• Mark Saly (110 patents)

View full patent text on Google Patents →