Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176205 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Yong Cao, Kevin Moraes, Shane Lavan | 2024-11-12 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-07-02 |
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Ho-yung David Hwang | 2024-05-28 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung, Xianmin Tang +4 more | 2024-02-27 |