Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185643 | High critical temperature metal nitride layer with oxide or oxynitride seed layer | Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Zhebo Chen +2 more | 2024-12-31 |
| 12183560 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Kirankumar Neelasandra SAVANDAIAH, Sundarapandian Ramalinga Vijayalakshmi REDDY, Randal Dean Schmieding, Yong Cao | 2024-12-31 |
| 12176205 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Kevin Moraes | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Kevin Moraes | 2024-11-12 |
| 12096701 | Method of making high critical temperature metal nitride layer | Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Zhebo Chen +2 more | 2024-09-17 |
| 12052935 | Method of making high critical temperature metal nitride layer | Zihao Yang, Mingwei Zhu, Shriram Mangipudi, Mohammad Kamruzzaman Chowdhury, Zhebo Chen +2 more | 2024-07-30 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-07-02 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-02-27 |