Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176205 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Shane Lavan | 2024-11-12 |