Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176205 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Kevin Moraes, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Jothilingam Ramalingam, Yong Cao, Kevin Moraes, Shane Lavan | 2024-11-12 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Xi Cen, Kai Wu, Min Heon, Wei Min Chan, Tom Ho Wing Yu +4 more | 2024-09-17 |