Issued Patents 2024
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183560 | Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process | Shane Lavan, Sundarapandian Ramalinga Vijayalakshmi REDDY, Randal Dean Schmieding, Yong Cao | 2024-12-31 |
| 12100614 | Apparatus for controlling lift pin movement | Anubhav Srivastava, Bhaskar PRASAD, Thomas Brezoczky, Nitin Bharadwaj SATYAVOLU | 2024-09-24 |
| 12080571 | Substrate processing module and method of moving a workpiece | Srinivasa Rao YEDLA, Thomas Brezoczky | 2024-09-03 |
| D1040304 | Deposition ring for physical vapor deposition chamber | David Gunther, Cheng-Hsiung Tsai | 2024-08-27 |
| 12043896 | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure | Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky | 2024-07-23 |
| 12027354 | Cleaning of SIN with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-07-02 |
| 12002668 | Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool | Srinivasa Rao YEDLA, Thomas Brezoczky, Hari Prasath Rajendran | 2024-06-04 |
| 11961723 | Process kit having tall deposition ring for PVD chamber | David Gunther, Cheng-Hsiung Tsai | 2024-04-16 |
| 11955355 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Bhaskar PRASAD, Thomas Brezoczky | 2024-04-09 |
| 11935732 | Process kit geometry for particle reduction in PVD processes | Adolph Miller Allen, Randal Dean Schmieding, Vanessa Faune | 2024-03-19 |
| 11915918 | Cleaning of sin with CCP plasma or RPS clean | Jothilingam Ramalingam, Yong Cao, Ilya Lavitsky, Keith A. Miller, Tza-Jing Gung +4 more | 2024-02-27 |
| 11898236 | Methods and apparatus for processing a substrate | Zhiyong Wang, Halbert Chong, John C. Forster, Irena H. Wysok, Tiefeng Shi +9 more | 2024-02-13 |