Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100614 | Apparatus for controlling lift pin movement | Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU | 2024-09-24 |
| 12080571 | Substrate processing module and method of moving a workpiece | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA | 2024-09-03 |
| 12043896 | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan | 2024-07-23 |
| 12002668 | Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool | Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Hari Prasath Rajendran | 2024-06-04 |
| 11955355 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Bhaskar PRASAD | 2024-04-09 |