Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002668 | Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool | Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky | 2024-06-04 |