Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100614 | Apparatus for controlling lift pin movement | Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky | 2024-09-24 |
| 12043896 | Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky | 2024-07-23 |
| 11955355 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Bhaskar PRASAD, Thomas Brezoczky | 2024-04-09 |