Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025917 | System and method for supplying and dispensing bubble-free photolithography chemical solutions | Wen-Zhan Zhou, Heng-Jen Lee, Hsu-Yuan Liu, Yu-Chen Huang, Cheng-Han Wu +1 more | 2024-07-02 |
| 12020908 | Atomic layer etching of Ru metal | Yung-Chen Lin, Chi-I Lang | 2024-06-25 |
| 11994800 | Dose reduction of patterned metal oxide photoresists | Tejinder Singh, Lifan Yan, Abhijit Basu Mallick, Daniel Lee Diehl, Jothilingam Ramalingam | 2024-05-28 |
| 11869807 | Fully self-aligned subtractive etch | Lili Feng, Yuqiong Dai, Madhur Sachan, Regina Freed | 2024-01-09 |