Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084764 | Vapor phase photoresists deposition | Lakmal C. Kalutarage, Aaron Dangerfield, Mark Saly, David Thompson, Susmit Singha Roy | 2024-09-10 |
| 12068170 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan | 2024-08-20 |
| 12033866 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Madhur Sachan | 2024-07-09 |
| 11886120 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan +3 more | 2024-01-30 |
| 11881402 | Self aligned multiple patterning | Lili Feng, Madhur Sachan | 2024-01-23 |
| 11869807 | Fully self-aligned subtractive etch | Lili Feng, Yuqiong Dai, Madhur Sachan, Ho-yung David Hwang | 2024-01-09 |