| 12131900 |
Methods for depositing blocking layers on metal surfaces |
Bhaskar Jyoti Bhuyan, Lakmal C. Kalutarage, Thomas Knisley |
2024-10-29 |
$69,228,000 |
| 12110584 |
Low temperature growth of transition metal chalcogenides |
Chandan Das, Susmit Singha Roy, Bhaskar Jyoti Bhuyan, John Sudijono, Abhijit Basu Mallick |
2024-10-08 |
$69,128,000 |
| 12094766 |
Selective blocking of metal surfaces using bifunctional self-assembled monolayers |
Michael L. McSwiney, Bhaskar Jyoti Bhuyan, Drew Phillips, Aaron Dangerfield, David Thompson +2 more |
2024-09-17 |
$46,375,000 |
| 12084764 |
Vapor phase photoresists deposition |
Lakmal C. Kalutarage, Aaron Dangerfield, David Thompson, Susmit Singha Roy, Regina Freed |
2024-09-10 |
$81,152,000 |
| 12084464 |
Rhenium complexes and methods of use |
Thomas Knisley, Keenan N. Woods, Charles H. Winter, Stefan Cwik |
2024-09-10 |
$81,152,000 |
| 12068170 |
Vapor phase thermal etch solutions for metal oxo photoresists |
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed |
2024-08-20 |
$94,413,000 |
| 12060370 |
Molybdenum (0) precursors for deposition of molybdenum films |
Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong +1 more |
2024-08-13 |
$69,975,000 |
| 12040427 |
Preclean and encapsulation of microLED features |
Thomas Knisley, Bhaskar Jyoti Bhuyan, Mingwei Zhu |
2024-07-16 |
$116,305,000 |
| 12033866 |
Vapor phase thermal etch solutions for metal oxo photoresists |
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed |
2024-07-09 |
$62,454,000 |
| 12031209 |
Reducing agents for atomic layer deposition |
Bhaskar Jyoti Bhuyan, Lakmal C. Kalutarage, Thomas Knisley |
2024-07-09 |
$62,454,000 |
| 12018363 |
Gap-fill with aluminum-containing films |
Lakmal C. Kalutarage, Jeffrey W. Anthis, Tatsuya Sato |
2024-06-25 |
$57,214,000 |
| 12014925 |
Metal-doped carbon hardmasks |
Eswaranand Venkatasubramanian, Bhaskar Jyoti Bhuyan, Abhijit Basu Mallick |
2024-06-18 |
$83,264,000 |
| 11990332 |
Methods and apparatus for deposition of low-k films |
Bhaskar Jyoti Bhuyan, Zhelin Sun, Ning Li, Mihaela Balseanu, Li-Qun Xia +2 more |
2024-05-21 |
$57,593,000 |
| 11972940 |
Area selective carbon-based film deposition |
Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick +2 more |
2024-04-30 |
$79,776,000 |
| 11970777 |
Deposition of low-k films |
Shuaidi Zhang, Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Thomas Knisley |
2024-04-30 |
$79,776,000 |
| 11942330 |
Methods for selective dry etching gallium oxide |
Feng Q. Liu, Lisa J. Enman, Lakmal C. Kalutarage |
2024-03-26 |
$55,219,000 |
| 11932940 |
Silyl pseudohalides for silicon containing films |
Keenan N. Woods, Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Lisa J. Enman |
2024-03-19 |
$54,086,000 |
| 11932938 |
Corrosion resistant film on a chamber component and methods of depositing thereof |
Lisa J. Enman, Steven Marcus, Lei Zhou |
2024-03-19 |
$54,086,000 |
| 11891690 |
Molybdenum thin films by oxidation-reduction |
Feng Q. Liu, Alexander Jansen |
2024-02-06 |
$39,056,000 |
| 11886120 |
Deposition of semiconductor integration films |
Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more |
2024-01-30 |
$39,141,000 |
| 11866824 |
Homoleptic lanthanide deposition precursors |
Thomas Knisley |
2024-01-09 |
$49,156,000 |
| 11859278 |
Molecular layer deposition of amorphous carbon films |
Bhaskar Jyoti Bhuyan, Ahbijit Basu Mallick, Eugene Yu Jin Kong, Bo Qi |
2024-01-02 |
$40,045,000 |
