Issued Patents 2024
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131900 | Methods for depositing blocking layers on metal surfaces | Bhaskar Jyoti Bhuyan, Lakmal C. Kalutarage, Thomas Knisley | 2024-10-29 |
| 12110584 | Low temperature growth of transition metal chalcogenides | Chandan Das, Susmit Singha Roy, Bhaskar Jyoti Bhuyan, John Sudijono, Abhijit Basu Mallick | 2024-10-08 |
| 12094766 | Selective blocking of metal surfaces using bifunctional self-assembled monolayers | Michael L. McSwiney, Bhaskar Jyoti Bhuyan, Drew Phillips, Aaron Dangerfield, David Thompson +2 more | 2024-09-17 |
| 12084764 | Vapor phase photoresists deposition | Lakmal C. Kalutarage, Aaron Dangerfield, David Thompson, Susmit Singha Roy, Regina Freed | 2024-09-10 |
| 12084464 | Rhenium complexes and methods of use | Thomas Knisley, Keenan N. Woods, Charles H. Winter, Stefan Cwik | 2024-09-10 |
| 12068170 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2024-08-20 |
| 12060370 | Molybdenum (0) precursors for deposition of molybdenum films | Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong +1 more | 2024-08-13 |
| 12040427 | Preclean and encapsulation of microLED features | Thomas Knisley, Bhaskar Jyoti Bhuyan, Mingwei Zhu | 2024-07-16 |
| 12033866 | Vapor phase thermal etch solutions for metal oxo photoresists | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Madhur Sachan, Regina Freed | 2024-07-09 |
| 12031209 | Reducing agents for atomic layer deposition | Bhaskar Jyoti Bhuyan, Lakmal C. Kalutarage, Thomas Knisley | 2024-07-09 |
| 12018363 | Gap-fill with aluminum-containing films | Lakmal C. Kalutarage, Jeffrey W. Anthis, Tatsuya Sato | 2024-06-25 |
| 12014925 | Metal-doped carbon hardmasks | Eswaranand Venkatasubramanian, Bhaskar Jyoti Bhuyan, Abhijit Basu Mallick | 2024-06-18 |
| 11990332 | Methods and apparatus for deposition of low-k films | Bhaskar Jyoti Bhuyan, Zhelin Sun, Ning Li, Mihaela Balseanu, Li-Qun Xia +2 more | 2024-05-21 |
| 11972940 | Area selective carbon-based film deposition | Xinke Wang, Bhaskar Jyoti Bhuyan, Zeqing Shen, Susmit Singha Roy, Abhijit Basu Mallick +2 more | 2024-04-30 |
| 11970777 | Deposition of low-k films | Shuaidi Zhang, Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Thomas Knisley | 2024-04-30 |
| 11942330 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lisa J. Enman, Lakmal C. Kalutarage | 2024-03-26 |
| 11932940 | Silyl pseudohalides for silicon containing films | Keenan N. Woods, Cong Trinh, Mihaela Balseanu, Maribel Maldonado-Garcia, Lisa J. Enman | 2024-03-19 |
| 11932938 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Steven Marcus, Lei Zhou | 2024-03-19 |
| 11891690 | Molybdenum thin films by oxidation-reduction | Feng Q. Liu, Alexander Jansen | 2024-02-06 |
| 11886120 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Bhaskar Jyoti Bhuyan, Thomas Knisley, Kelvin Chan, Regina Freed +3 more | 2024-01-30 |
| 11866824 | Homoleptic lanthanide deposition precursors | Thomas Knisley | 2024-01-09 |
| 11859278 | Molecular layer deposition of amorphous carbon films | Bhaskar Jyoti Bhuyan, Ahbijit Basu Mallick, Eugene Yu Jin Kong, Bo Qi | 2024-01-02 |