Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11942330 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lakmal C. Kalutarage, Mark Saly | 2024-03-26 |
| 11932938 | Corrosion resistant film on a chamber component and methods of depositing thereof | Steven Marcus, Mark Saly, Lei Zhou | 2024-03-19 |
| 11932940 | Silyl pseudohalides for silicon containing films | Keenan N. Woods, Cong Trinh, Mark Saly, Mihaela Balseanu, Maribel Maldonado-Garcia | 2024-03-19 |