Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074010 | Atomic layer deposition part coating chamber | Michael R. Rice, Hanish Kumar Panavalappil Kumarankutty, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more | 2024-08-27 |
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa +5 more | 2024-04-02 |
| 11932938 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Mark Saly, Lei Zhou | 2024-03-19 |