Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125675 | RF pulsing assisted low-k film deposition with high mechanical strength | Ruitong Xiong, Bo Xie, Xiaobo Li, Yijun Liu | 2024-10-22 |
| 12119223 | Single precursor low-k film deposition and UV cure for advanced technology node | Bo Xie, Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu | 2024-10-15 |
| 12110589 | Methods for metal oxide post-treatment | Tatsuya Sato, Wei Liu | 2024-10-08 |
| 11990332 | Methods and apparatus for deposition of low-k films | Bhaskar Jyoti Bhuyan, Mark Saly, Zhelin Sun, Ning Li, Mihaela Balseanu +2 more | 2024-05-21 |
| 11967498 | Systems and methods for depositing low-k dielectric films | Bo Xie, Kang Sub Yim, Yijun Liu, Ruitong Xiong | 2024-04-23 |
| 11887818 | Methods and systems to modulate film stress | Tsutomu Tanaka, John C. Forster, Ran Liu, Kenichi Ohno, Ning Li +2 more | 2024-01-30 |