Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125675 | RF pulsing assisted low-k film deposition with high mechanical strength | Ruitong Xiong, Xiaobo Li, Yijun Liu, Li-Qun Xia | 2024-10-22 |
| 12119223 | Single precursor low-k film deposition and UV cure for advanced technology node | Ruitong Xiong, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2024-10-15 |
| 11967498 | Systems and methods for depositing low-k dielectric films | Kang Sub Yim, Yijun Liu, Li-Qun Xia, Ruitong Xiong | 2024-04-23 |