Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018363 | Gap-fill with aluminum-containing films | Mark Saly, Lakmal C. Kalutarage, Tatsuya Sato | 2024-06-25 |
| 11946135 | Low temperature deposition of iridium containing films | Feng Q. Liu, Hua Chung, Schubert S. Chu, Mei Chang, David Thompson | 2024-04-02 |
| 11894233 | Electronic device having an oxygen free platinum group metal film | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu +3 more | 2024-02-06 |