Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131913 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Dimitri Kioussis, Karthik Janakiraman | 2024-10-29 |
| 12112949 | Highly etch selective amorphous carbon film | Rajesh Prasad, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-10-08 |
| 12100609 | Electrostatic chucking process | Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee | 2024-09-24 |
| 12014927 | Highly etch selective amorphous carbon film | Rajesh Prasad, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-06-18 |
| 12000048 | Pedestal for substrate processing chambers | Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more | 2024-06-04 |