Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Vinay Prabhakar +3 more | 2024-11-05 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2024-06-04 |
| 11875969 | Process chamber with reduced plasma arc | Fei Wu, Abdul Aziz Khaja, Vinay Prabhakar, Ganesh Balasubramanian | 2024-01-16 |